| 10962891 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +15 more |
2021-03-30 |
| 10678139 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2020-06-09 |
| 10527955 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2020-01-07 |
| 10503084 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +15 more |
2019-12-10 |
| 10261428 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2019-04-16 |
| 10248034 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2019-04-02 |
| 10180629 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2019-01-15 |
| 9541843 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid |
Joeri Lof, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers, Klaus Simon +16 more |
2017-01-10 |
| 9482966 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +8 more |
2016-11-01 |
| 9482962 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2016-11-01 |
| 9152058 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening |
Joeri Lof, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers, Klaus Simon +16 more |
2015-10-06 |
| 9081299 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
Joeri Lof, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers, Klaus Simon +16 more |
2015-07-14 |
| 8860923 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2014-10-14 |
| 8638418 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2014-01-28 |
| 8558989 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2013-10-15 |
| 8542343 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2013-09-24 |
| 8542344 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2013-09-24 |
| 8482845 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers, Klaus Simon +16 more |
2013-07-09 |
| 8472002 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2013-06-25 |
| 8451422 |
Re-flow and buffer system for immersion lithography |
Harry Sewell, Sjoerd Nicolaas Lambertus Donders, Louis John Markoya, Diane McCafferty, Ralph Joseph Meijers |
2013-05-28 |
| 8154708 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2012-04-10 |
| 7868998 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2011-01-11 |
| 7602472 |
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device |
Edwin Johan Buis, Christiaan Alexander Hoogendam, Alexander Matthijs Struycken, Arnoud Cornelis Wassink, Paul Peter Anna Antonius Brom |
2009-10-13 |
| 7593092 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2009-09-22 |
| 7411653 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2008-08-12 |