Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8902400 | Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Michel Riepen, Rogier Hendrikus Magdalena Cortie, Fabrizio Evangelista | 2014-12-02 |
| 8614784 | Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply | Michel Riepen, Nicolaas Rudolf Kemper, Johannes Catharinus Hubertus Mulkens, Rogier Hendrikus Magdalena Cortie, Fabrizio Evangelista | 2013-12-24 |
| 8451422 | Re-flow and buffer system for immersion lithography | Harry Sewell, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Louis John Markoya, Diane McCafferty | 2013-05-28 |
| 8405817 | Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method | Marco Koert Stavenga, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +16 more | 2013-03-26 |