Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143968 | Fluid handling structure, lithographic apparatus and device manufacturing method | Daniel Jozef Maria Direcks, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Danny Maria Hubertus Philips, Michel Riepen +2 more | 2021-10-12 |
| 10620544 | Fluid handling structure, lithographic apparatus and device manufacturing method | Rogier Hendrikus Magdalena Cortie, Paulus Martinus Maria Liebregts, Michel Riepen | 2020-04-14 |
| 10209624 | Fluid handling structure, lithographic apparatus and device manufacturing method | Rogier Hendrikus Magdalena Cortie, Paulus Martinus Maria Liebregts, Michel Riepen | 2019-02-19 |
| 9846372 | Fluid handling structure, lithographic apparatus and device manufacturing method | Rogier Hendrikus Magdalena Cortie, Paulus Martinus Maria Liebregts, Michel Riepen | 2017-12-19 |
| 9625828 | Fluid handling structure, lithographic apparatus and device manufacturing method | Michel Riepen, Erik Henricus Egidius Catharina Eummelen, Sandra Van Der Graaf, Rogier Hendrikus Magdalena Cortie, Takeshi Kaneko +6 more | 2017-04-18 |
| 9470985 | Lithographic apparatus, sensor and method | Derk Jan Wilfred Klunder, Cornelis Cornelia De Bruijn | 2016-10-18 |
| 9383654 | Fluid handling structure, lithographic apparatus and device manufacturing method | Daniel Jozef Maria Direcks, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Danny Maria Hubertus Philips, Michel Riepen +2 more | 2016-07-05 |
| 9256136 | Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply | Rogier Hendrikus Magdalena Cortie, Paulus Martinus Maria Liebregts, Michel Riepen | 2016-02-09 |
| 8902400 | Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Michel Riepen, Rogier Hendrikus Magdalena Cortie, Ralph Joseph Meijers | 2014-12-02 |
| 8614784 | Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply | Michel Riepen, Nicolaas Rudolf Kemper, Johannes Catharinus Hubertus Mulkens, Rogier Hendrikus Magdalena Cortie, Ralph Joseph Meijers | 2013-12-24 |
| 8405817 | Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method | Marco Koert Stavenga, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +16 more | 2013-03-26 |