Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470985 | Lithographic apparatus, sensor and method | Fabrizio Evangelista, Derk Jan Wilfred Klunder | 2016-10-18 |
| 7826037 | Radiation beam pulse trimming | Huibert Visser, Oscar Franciscus Jozephus Noordman, Henri Johannes Petrus Vink, Marcus Gerhardus Hendrikus Meijerink, Koenraad Remi André Maria Schreel | 2010-11-02 |
| 6469310 | Radiation source for extreme ultraviolet radiation, e.g. for use in lithographic projection apparatus | Henryk Fiedorowicz, Frederik Bijkerk, Andrzej Bartnik | 2002-10-22 |
| 6452194 | Radiation source for use in lithographic projection apparatus | Frederik Bijkerk, Henryk Fiedorowicz, Andrzej Bartnik, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine | 2002-09-17 |