| 8362444 |
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method |
Vladimir Vitalevitch Ivanov, Vadim Yevgenyevich Banine |
2013-01-29 |
| 8317929 |
Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus |
Tatyana Victorovna Rakhimova, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Johannes Hubertus Josephina Moors, Aleksander Sergeevich Kovalev +1 more |
2012-11-27 |
| 8018574 |
Lithographic apparatus, radiation system and device manufacturing method |
Robert Rafilevitch Gayazov, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Givi Georgievitch Zukavishvili +1 more |
2011-09-13 |
| 7838853 |
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method |
Vladimir Vitalevitch Ivanov, Vadim Yevgenyevich Banine |
2010-11-23 |
| RE41362 |
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Frederik Bijkerk, Givi Georgievitch Zukavishvili, Evgenii Dmitreevitch Korop, Vladimir Vital'evitch Ivanov |
2010-06-01 |
| 7696493 |
Radiation system and lithographic apparatus |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Derk Jan Wilfred Klunder |
2010-04-13 |
| 7696492 |
Radiation system and lithographic apparatus |
Arnoud Cornelis Wassink, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Theodorus Petrus Maria Cadee, Vladimir Mihailovitch Krivtsun +4 more |
2010-04-13 |
| 7528395 |
Radiation source, lithographic apparatus and device manufacturing method |
Vadim Yevgenyevich Banine, Vladimir Vital'evitch Ivanov, Erik René Kieft, Erik Roelof Loopstra, Lucas Henricus Johannes Stevens +5 more |
2009-05-05 |
| 7518134 |
Plasma radiation source for a lithographic apparatus |
Vladimir Vitalevitch Ivanov, Vadim Yevgenyevich Banine, Vladimir Mihailovitch Krivtsun |
2009-04-14 |
| 7501642 |
Radiation source |
Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Johannes Christiaan Leonardus Franken, Vladimir Vitalevitch Ivanov, Alexander Matthijs Struycken |
2009-03-10 |
| 7462851 |
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Robert Rafilevitch Gayazov, Vladimir Mihailovitch Krivtsun |
2008-12-09 |
| 7335900 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Givi Georgievitch Zukavishvili, Robert Rafilevitch Gayazov, Vladimir Mihailovitch Krivtsun |
2008-02-26 |
| 7279690 |
Lithographic apparatus and device manufacturing method |
Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Bastiaan Mertens, Johannes Hubertus Josephina Moors +4 more |
2007-10-09 |
| 7208746 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Givi Georgievitch Zukavishvili, Robert Rafilevitch Gayazov, Vladimir Mihailovitch Krivtsum |
2007-04-24 |
| 7135692 |
Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation |
Vladimir Vitalevitch Ivanov, Vadim Yevgenyevich Banine |
2006-11-14 |
| 7061574 |
Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby |
Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Vladimir Mihailovitch Krivtsun |
2006-06-13 |
| 6933510 |
Radiation source, lithographic apparatus, and device manufacturing method |
Givi Georgievitch Zukavishvili, Vladimir Vital'evitch Ivanov, Evgenil Korob, Vadim Yevgenyevich Banine, Pavel Stanislavovich Antsiferov |
2005-08-23 |
| 6862075 |
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby |
Norbertus Benedictus Koster, Bastiaan Mertens, Martinus Hendrikus Antonius Leenders, Vladimir Vitalevitch Ivanov, Vadim Yevgenyevich Banine |
2005-03-01 |
| 6818912 |
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Frederik Bijkerk, Givi Georgievitch Zukavishvili, Evgenii Dmitreevitch Korop, Vladimir Vital'evitch Ivanov |
2004-11-16 |
| 6667484 |
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Frederik Bijkerk, Givi Georgievitch Zukavishvili, Evgenii Dmitreevitch Korop, Vladimir Vital'evitch Ivanov |
2003-12-23 |
| 6614505 |
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby |
Norbertus Benedictus Koster, Bastiaan Mertens, Martinus Hendrikus Antonius Leenders, Vladimir Vital'evitch Ivanov, Vadim Yevgenyevich Banine |
2003-09-02 |
| 6452194 |
Radiation source for use in lithographic projection apparatus |
Frederik Bijkerk, Henryk Fiedorowicz, Cornelis Cornelia De Bruijn, Andrzej Bartnik, Vadim Yevgenyevich Banine |
2002-09-17 |