Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8317929 | Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus | Tatyana Victorovna Rakhimova, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Konstantin Nikolaevitch Koshelev, Johannes Hubertus Josephina Moors +1 more | 2012-11-27 |