Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018574 | Lithographic apparatus, radiation system and device manufacturing method | Robert Rafilevitch Gayazov, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Givi Georgievitch Zukavishvili +1 more | 2011-09-13 |
| 7335900 | Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Vladimir Vitalevitch Ivanov, Givi Georgievitch Zukavishvili, Robert Rafilevitch Gayazov, Vladimir Mihailovitch Krivtsun | 2008-02-26 |
| 7208746 | Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Vladimir Vitalevitch Ivanov, Givi Georgievitch Zukavishvili, Robert Rafilevitch Gayazov, Vladimir Mihailovitch Krivtsum | 2007-04-24 |