Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE41362 | Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Frederik Bijkerk, Givi Georgievitch Zukavishvili, Vladimir Vital'evitch Ivanov | 2010-06-01 |
| 6818912 | Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Frederik Bijkerk, Givi Georgievitch Zukavishvili, Vladimir Vital'evitch Ivanov | 2004-11-16 |
| 6667484 | Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Frederik Bijkerk, Givi Georgievitch Zukavishvili, Vladimir Vital'evitch Ivanov | 2003-12-23 |