Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8717535 | SLM calibration | Huibert Visser, Martinus Hendricus Hoeks, Borgert Kruizinga, Bob Streefkerk, Patricius Aloysius Jacobus Tinnemans +4 more | 2014-05-06 |
| 8585224 | Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination | Dirk Heinrich Ehm, Stephan Muellender, Thomas Stein, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn +2 more | 2013-11-19 |
| 8382301 | Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination | Dirk Heinrich Ehm, Stephan Muellender, Thomas Stein, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn +2 more | 2013-02-26 |
| 7826037 | Radiation beam pulse trimming | Huibert Visser, Oscar Franciscus Jozephus Noordman, Henri Johannes Petrus Vink, Koenraad Remi André Maria Schreel, Cornelis Cornelia De Bruijn | 2010-11-02 |
| 7714986 | Laser beam conditioning system comprising multiple optical paths allowing for dose control | Huibert Visser, Pieter Willem Herman De Jager, Henri Johannes Petrus Vink | 2010-05-11 |
| 7671347 | Cleaning method, apparatus and cleaning system | Dirk Heinrich Ehm, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Thomas Stein | 2010-03-02 |