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Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of use |
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Pellicle and pellicle assembly |
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Substrate support, lithographic apparatus and loading method |
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Method for providing a wear-resistant material on a body, and composite body |
Andrey Nikipelov |
2024-01-16 |
| 11754918 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen, Paul Janssen +18 more |
2023-09-12 |
| 11556063 |
Substrate support, lithographic apparatus and loading method |
Johannes Onvlee, Wim Symens, David Ferdinand Vles |
2023-01-17 |
| 11421729 |
Elastic guiding device, positioning device, blade and lithographic apparatus |
Erwin Andreas Bernardus Mulder, Krijn Frederik Bustraan, Rinze Koolstra, Paul Peter Anna Antonius Brom |
2022-08-23 |
| 11231646 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen, Paul Janssen +18 more |
2022-01-25 |
| 11156924 |
Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method |
Johannes Petrus Martinus Bernardus Vermeulen, Luc Leonardus Adrianus Martinus Meulendijks, Johannes Adrianus Cornelis Maria Pijnenburg |
2021-10-26 |
| 11003095 |
Positioning system and lithographic apparatus |
Krijn Frederik Bustraan, Yang-Shan Huang, Minkyu Kim, Jasper Anne Frido Marikus Simons, Theo Anjes Maria Ruijl +1 more |
2021-05-11 |
| 10908518 |
Lithographic apparatus and method |
Santiago E. DELPUERTO, Kenneth C. Henderson, Raymond Wilhelmus Louis Lafarre, Matthew Lipson, Louis John Markoya +3 more |
2021-02-02 |
| 10747125 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Christiaan Alexander Hoogendam +6 more |
2020-08-18 |
| 10684558 |
Motor assembly, lithographic apparatus and device manufacturing method |
Pim Jozef Hendrik Duijsens |
2020-06-16 |
| 10228626 |
Movable support and lithographic apparatus |
Theo Anjes Maria Ruijl, Christiaan Louis Valentin, Christian Werner |
2019-03-12 |
| 10191392 |
Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator |
Johannes Adrianus Antonius Theodorus Dams, Dirk Hendrikus Marinus ENGELEN, Peter Michel Silvester Maria Heijmans, Simon Bernardus Cornelis Maria Martens, Hans Butler |
2019-01-29 |
| 10120292 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Christiaan Alexander Hoogendam +6 more |
2018-11-06 |
| 10001713 |
Lithographic apparatus and method |
Santiago del Puerto, Matthew Lipson, Kenneth C. Henderson, Raymond Wilhelmus Louis Lafarre, Louis John Markoya +3 more |
2018-06-19 |
| 9921494 |
Lithographic apparatus comprising an actuator, and method for protecting such actuator |
Theodorus Petrus Maria Cadee, Sander Christiaan Broers, Sven Antoin Johan Hol, Yang-Shan Huang, Bastiaan Lambertus Wilhelmus Marinus Van De Ven |
2018-03-20 |
| 9753381 |
Substrate table system, lithographic apparatus and substrate table swapping method |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Hans Butler |
2017-09-05 |
| 9726985 |
Stage system and a lithographic apparatus |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Johannes Petrus Martinus Bernardus Vermeulen, Theodorus Petrus Maria Cadee, Robertus Mathijs Gerardus Rijs, Richard Henricus Adrianus Van Lieshout |
2017-08-08 |
| 9507275 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Christiaan Alexander Hoogendam +6 more |
2016-11-29 |
| 9389518 |
Stage system and a lithographic apparatus |
Raymond Wilhelmus Louis Lafarre, Yang-Shan Huang, Sander Christiaan Broers, Peter Laurentius Maria Ros |
2016-07-12 |
| 9182683 |
Lithographic apparatus and lithographic projection method |
Ruud Antonius Catharina Maria Beerens |
2015-11-10 |
| 8947640 |
Positioning device, lithographic apparatus, positioning method and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Henrikus Herman Marie Cox, Johannes Petrus Martinus Bernardus Vermeulen |
2015-02-03 |
| 8932042 |
Lithographic apparatus and device manufacturing method |
Johannes Petrus Martinus Bernardus Vermeulen, Theodorus Petrus Maria Cadee, Jeroen De Boeij |
2015-01-13 |
