Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11947271 | Lithographic systems and methods of operating the same | Mikhail Yurievich Loktev | 2024-04-02 |
| 11921435 | Lithographic systems and methods of operating the same | Mikhail Yurievich Loktev | 2024-03-05 |
| 11550232 | Lithographic systems and methods of operating the same | Mikhail Yurievich Loktev | 2023-01-10 |
| 9875879 | Charged particle microscope with vibration detection / correction | Johannes Antonius Maria van den Oetelaar, Albert Visscher | 2018-01-23 |
| 9081307 | Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method | Sven Antoin Johan Hol, Johannes Petrus Martinus Bernardus Vermeulen, Wilhelmus Henricus Theodorus Maria Aangenent, George Wilhelmus Johannes Clijsen, Johannes Antonius Gerardus Akkermans +1 more | 2015-07-14 |
| 8932042 | Lithographic apparatus and device manufacturing method | Johannes Petrus Martinus Bernardus Vermeulen, Antonius Franciscus Johannes De Groot, Theodorus Petrus Maria Cadee | 2015-01-13 |
| 8687171 | Electromagnetic actuator, stage apparatus and lithographic apparatus | Sven Antoin Johan Hol, Jan Van Eijk, Johannes Petrus Martinus Bernardus Vermeulen, Gerard Johannes Pieter Nijsse, Simon Bernardus Cornelis Maria Martens +4 more | 2014-04-01 |