Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8896811 | Positioning system and a method for positioning a substage with respect to a frame | Sven Antoin Johan Hol, Jan Van Eijk, Johannes Petrus Martinus Bernardus Vermeulen, Geert-Jan Petrus Naaijkens, Marijn Kessels +1 more | 2014-11-25 |
| 8755030 | Lithographic apparatus and device manufacturing method | Christiaan Louis Valentin, Robert-Han Munnig Schmidt, Johannes Petrus Martinus Bernardus Vermeulen, Bartholomeus Catharina Thomas Van Bree | 2014-06-17 |
| 8736815 | Position sensor and lithographic apparatus | Ruud Antonius Catharina Maria Beerens, Johannes Petrus Martinus Bernardus Vermeulen | 2014-05-27 |
| 8472010 | Actuator, positioning system and lithographic apparatus | Sven Antoin Johan Hol, Theodorus Petrus Maria Cadee, Marijn Kessels, Daniël Godfried Emma Hobbelen | 2013-06-25 |