Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315756 | Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of use | Nicolaas Ten Kate, Siegfried Alexander Tromp, Koen Gerhardus Winkels, Antonius Franciscus Johannes De Groot | 2025-05-27 |
| 11880144 | Object table, a stage apparatus and a lithographic apparatus | Sander Jeroen HERMANUSSEN, Johannes Petrus Martinus Bernardus Vermeulen, Hans Butler, Bas JANSEN | 2024-01-23 |