Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12210294 | Actuator assemblies comprising piezo actuators or electrostrictive actuators | Hans Butler | 2025-01-28 |
| 12117739 | Thermo-mechanical actuator | Koen Martin Willem Jan BOS, Johannes Petrus Martinus Bernardus Vermeulen | 2024-10-15 |
| 11880144 | Object table, a stage apparatus and a lithographic apparatus | Sander Jeroen HERMANUSSEN, Johannes Petrus Martinus Bernardus Vermeulen, Hans Butler, Michael Marinus Anna STEUR | 2024-01-23 |
| 11789373 | Object positioning system diagnostic and calibration methods positioning control method lithographic apparatus and device manufacturing method | Samer Abdelmoeti Abuzeid Abdelmoeti, Hans Butler, Koen Johan Frederik Loonen, Aditya Singh, Ruben Etienne Johan Rinus Vandervelden | 2023-10-17 |
| 11561479 | Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method | Hans Butler, Cornelius Adrianus Lambertus De Hoon | 2023-01-24 |
| 11467504 | Piezoelectric actuator, actuator system, substrate support, and lithographic apparatus including the actuator | Hans Butler, Alexander Pascal Dijkshoorn | 2022-10-11 |
| 10416572 | Positioning system, method to position, lithographic apparatus and device manufacturing method | Hans Butler, Wim Symens | 2019-09-17 |