Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11561479 | Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method | Hans Butler, Bas JANSEN | 2023-01-24 |
| 11422477 | Vibration isolation system and lithographic apparatus | Roy Hendrikus Emilie Maria Jacobs, Jeroen Pieter Starreveld, Johannes Petrus Martinus Bernardus Vermeulen | 2022-08-23 |
| 11269262 | Frame assembly, lithographic apparatus and device manufacturing method | Hans Butler, Joep Sander De Beer, Jeroen Pieter Starreveld, Martinus Van Duijnhoven, Maurice Willem Jozef Etiënne Wijckmans | 2022-03-08 |
| 11169450 | Pneumatic support device and lithographic apparatus with pneumatic support device | Hans Butler, Joep Sander De Beer, Jeroen Pieter Starreveld, Martinus Van Duijnhoven, Maurice Willem Jozef Etiënne Wijckmans | 2021-11-09 |
| 10816910 | Vibration isolator, lithographic apparatus and device manufacturing method | Hans Butler, Fransiscus Mathijs Jacobs, Pavel Kagan, Jeroen Pieter Starreveld, Maurice Willem Jozef Etiënne Wijckmans | 2020-10-27 |
| 10649347 | Lithographic apparatus and device manufacturing method | Michaël Johannes Christiaan RONDE, Lucas KUINDERSMA, Niels Johannes Maria Bosch, Hans Butler, Marc Wilhelmus Maria Van Der Wijst +2 more | 2020-05-12 |
| 10578983 | Lithographic apparatus having an active base frame support | Hans Butler, Björn Hubertus Maria Bukkems, Maurice Willem Jozef Etiënne Wijckmans | 2020-03-03 |
| 10503086 | Lithographic apparatus and device manufacturing method | Hans Butler, Fransiscus Mathijs Jacobs, Pavel Kagan, Jeroen Pieter Starreveld, Maurice Willem Jozef Etiënne Wijckmans | 2019-12-10 |
| 10409175 | Lithographic apparatus and device manufacturing method | Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Thijs Verhees, Sander Kerssemakers | 2019-09-10 |
| 9977349 | Support device, lithographic apparatus and device manufacturing method | Hans Butler, Ingmar August Kerp, Pieter Johannes Gertrudis Meijers, Jeroen Pieter Starreveld, Derk Ten Hoopen +4 more | 2018-05-22 |
| 9715171 | Imprint lithographic apparatus and imprint lithographic method | Hans Butler, Johannes Petrus Martinus Bernardus Vermeulen, Marc Wilhelmus Maria Van Der Wijst, Jeroen Pieter Starreveld, Francois Xavier Debiesme | 2017-07-25 |
| 8994919 | Lithographic apparatus and device manufacturing method | Hans Butler, Marc Wilhelmus Maria Van Der Wijst | 2015-03-31 |
| 8781775 | Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus | Hans Butler, Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen, Engelbertus Antonius Fransiscus Van Der Pasch, Harmen Klaas Van Der Schoot +2 more | 2014-07-15 |
| 8743344 | Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second object | Hans Butler, Martinus Van Duijnhoven, Johan Geerke, Joost De Pee | 2014-06-03 |
| 8245824 | Combination of structure and an active damping system, and a lithographic apparatus | Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Stijn Boschker | 2012-08-21 |
| 8203694 | Lithographic apparatus, projection assembly and active damping | Marc Wilhelmus Maria Van Der Wijst, Erik Roelof Loopstra | 2012-06-19 |
| 8164737 | Lithographic apparatus having an active damping subassembly | Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Stijn Boschker | 2012-04-24 |
| 8102505 | Lithographic apparatus comprising a vibration isolation support device | — | 2012-01-24 |
| 8059259 | Damping arrangement, active damping system, lithographic apparatus, and projection assembly | Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Stijn Boschker | 2011-11-15 |
| 7538273 | Cable connection to decrease the passing on of vibrations from a first object to a second object | Hans Butler, Martinus Van Duijnhoven, Johan Geerke, Joost De Pee | 2009-05-26 |