Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8245824 | Combination of structure and an active damping system, and a lithographic apparatus | Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon | 2012-08-21 |
| 8164737 | Lithographic apparatus having an active damping subassembly | Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon | 2012-04-24 |
| 8059259 | Damping arrangement, active damping system, lithographic apparatus, and projection assembly | Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon | 2011-11-15 |