Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835106 | Method for manufacturing damper device, lithographic apparatus, projection system, and device manufacturing method | Francois Xavier Debiesme, Eric Pierre-Yves Vennat | 2023-12-05 |
| 9977349 | Support device, lithographic apparatus and device manufacturing method | Hans Butler, Cornelius Adrianus Lambertus De Hoon, Ingmar August Kerp, Pieter Johannes Gertrudis Meijers, Jeroen Pieter Starreveld +4 more | 2018-05-22 |