Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835106 | Method for manufacturing damper device, lithographic apparatus, projection system, and device manufacturing method | Derk Ten Hoopen, Francois Xavier Debiesme | 2023-12-05 |
| 11029612 | Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness | Maarten Hartger Kimman, Hans Butler, Olof Martinus Josephus Fischer, Christiaan Alexander Hoogendam, Theodorus Mattheus Joannus Maria Huizinga +2 more | 2021-06-08 |