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Support, vibration isolation system, lithographic apparatus, object measurement apparatus, device manufacturing method |
Jeroen Johan Maarten Van De Wijdeven, Johannes Petrus Martinus Bernardus Vermeulen, Stan Henricus Van Der Meulen |
2023-11-28 |
| 11550227 |
Projection system and lithographic apparatus comprising said projection system |
Marinus Engelbertus Cornelis MUTSAERS, Robertus Johannes Marinus De Jongh |
2023-01-10 |
| 11422477 |
Vibration isolation system and lithographic apparatus |
Roy Hendrikus Emilie Maria Jacobs, Cornelius Adrianus Lambertus De Hoon, Johannes Petrus Martinus Bernardus Vermeulen |
2022-08-23 |
| 11269262 |
Frame assembly, lithographic apparatus and device manufacturing method |
Hans Butler, Joep Sander De Beer, Cornelius Adrianus Lambertus De Hoon, Martinus Van Duijnhoven, Maurice Willem Jozef Etiënne Wijckmans |
2022-03-08 |
| 11169450 |
Pneumatic support device and lithographic apparatus with pneumatic support device |
Hans Butler, Joep Sander De Beer, Cornelius Adrianus Lambertus De Hoon, Martinus Van Duijnhoven, Maurice Willem Jozef Etiënne Wijckmans |
2021-11-09 |
| 10838312 |
Lithographic apparatus, lithographic projection apparatus and device manufacturing method |
Maurice Willem Jozef Etiënne Wijckmans |
2020-11-17 |
| 10816910 |
Vibration isolator, lithographic apparatus and device manufacturing method |
Hans Butler, Cornelius Adrianus Lambertus De Hoon, Fransiscus Mathijs Jacobs, Pavel Kagan, Maurice Willem Jozef Etiënne Wijckmans |
2020-10-27 |
| 10503086 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Cornelius Adrianus Lambertus De Hoon, Fransiscus Mathijs Jacobs, Pavel Kagan, Maurice Willem Jozef Etiënne Wijckmans |
2019-12-10 |
| 9977349 |
Support device, lithographic apparatus and device manufacturing method |
Hans Butler, Cornelius Adrianus Lambertus De Hoon, Ingmar August Kerp, Pieter Johannes Gertrudis Meijers, Derk Ten Hoopen +4 more |
2018-05-22 |
| 9715171 |
Imprint lithographic apparatus and imprint lithographic method |
Hans Butler, Johannes Petrus Martinus Bernardus Vermeulen, Marc Wilhelmus Maria Van Der Wijst, Cornelius Adrianus Lambertus De Hoon, Francois Xavier Debiesme |
2017-07-25 |
| 9097990 |
Lithographic apparatus and stage system |
Jan-Gerard Cornelis Van Der Toorn, Marcel Koenraad Marie Baggen, Stefan Geerte Kruijswijk, Michael Johannes Vervoordeldonk, Mark Constant Johannes Baggen |
2015-08-04 |
| 8184266 |
Lithographic apparatus and device manufacturing method |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven |
2012-05-22 |
| 7595496 |
Optimized correction of wafer thermal deformations in a lithographic process |
Joost Jeroen Ottens, Harmen Klaas Van Der Schoot, Wouterus Johannes Petrus Maria Maas, Willem Jurrianus Venema, Boris Menchtchikov |
2009-09-29 |
| 7250237 |
Optimized correction of wafer thermal deformations in a lithographic process |
Joost Jeroen Ottens, Harmen Klaas Van Der Schoot, Wouterus Johannes Petrus Maria Maas, Willem Jurrianus Venema, Boris Menchtchikov |
2007-07-31 |
| 7119884 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens, Noud Jan Gilissen |
2006-10-10 |