Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9097990 | Lithographic apparatus and stage system | Jan-Gerard Cornelis Van Der Toorn, Marcel Koenraad Marie Baggen, Jeroen Pieter Starreveld, Michael Johannes Vervoordeldonk, Mark Constant Johannes Baggen | 2015-08-04 |
| 8441609 | Lithographic apparatus and a method of operating the lithographic apparatus | Edwin Cornelis Kadijk | 2013-05-14 |
| 7679715 | Lithographic processing cell, lithographic apparatus, track and device manufacturing method | Rard Willem De Leeuw, Paul Frank Luehrmann, Wim Tjibbo Tel, Paul Jacques Van Wijnen, Kars Zeger Troost | 2010-03-16 |
| 7646468 | Lithographic processing cell and device manufacturing method | — | 2010-01-12 |
| 7616291 | Lithographic processing cell and device manufacturing method | John Gerard Leeming | 2009-11-10 |
| 7403259 | Lithographic processing cell, lithographic apparatus, track and device manufacturing method | Rard Willem De Leeuw, Paul Frank Luehrmann, Wim Tjibbo Tel, Paul Jacques Van Wijnen, Kars Zeger Troost | 2008-07-22 |
| 7297911 | Lithographic apparatus, illumination system, illumination controller and control method | Johannes Heintze, Paul Van Der Veen | 2007-11-20 |
| 7230675 | Lithographic apparatus, device manufacturing method and device manufactured therewith | Erik Roelof Loopstra | 2007-06-12 |
| 7224440 | Lithographic apparatus and device manufacturing method | Marcel Mathijs Theodore Marie Dierichs, Markus Franciscus Antonius Eurlings, Heine Melle Mulder | 2007-05-29 |
| 7002667 | Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby | Leon Martin Levasier, Arie Jeffrey Den Boef, Ingo Dirnstorfer, Andre Bernardus Jeunink, Henricus Petrus Maria Pellemans +2 more | 2006-02-21 |
| 6995831 | Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure | Leon Martin Levasier, Arie Jeffrey Den Boef, Ingo Dirnstorfer, Andre Bernardus Jeunink, Henricus Petrus Maria Pellemans +2 more | 2006-02-07 |
| 5916698 | Apparatus comprising an electrical device and a battery holder | Elmo Marcus Attila Diederiks | 1999-06-29 |