| 12306544 |
Metrology tool with position control of projection system |
Hans Butler, Arie Jeffrey Den Boef, Jeroen Arnoldus Leonardus Johannes Raaymakers, Richard Carl Zimmerman |
2025-05-20 |
| 12249535 |
Substrate holder for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Marcus Martinus Petrus Adrianus Vermeulen, Simon Karel RAVENSBERGEN, Gijs Kramer, Roger Anton Marie Timmermans +1 more |
2025-03-11 |
| 11898601 |
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method |
Siegfried Alexander Tromp, Antonie Hendrik Verweij, Abraham Alexander Soethoudt, Jan Pieter Van De Poel |
2024-02-13 |
| 11749556 |
Substrate holder for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Marcus Martinus Petrus Adrianus Vermeulen, Simon Karel RAVENSBERGEN, Gijs Kramer, Roger Anton Marie Timmermans +1 more |
2023-09-05 |
| 11139196 |
Substrate holder for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Marcus Martinus Petrus Adrianus Vermeulen, Simon Karel RAVENSBERGEN, Gijs Kramer, Roger Anton Marie Timmermans +1 more |
2021-10-05 |
| 11098759 |
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method |
Siegfried Alexander Tromp, Antonie Hendrik Verweij, Abraham Alexander Soethoudt, Jan Pieter Van De Poel |
2021-08-24 |
| 10551746 |
Lithographic apparatus and method |
Benjamin Cunnegonda Henricus Smeets |
2020-02-04 |
| 10527092 |
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method |
Siegfried Alexander Tromp, Antonie Hendrik Verweij, Abraham Alexander Soethoudt, Jan Pieter Van De Poel |
2020-01-07 |
| 10114299 |
Lithographic apparatus |
Günes NAKIBOGLU, Gerard Johannes Boogaard, Nicolaas Rudolf Kemper, Sander Kerssemakers, Robertus Mathijs Gerardus Rijs +6 more |
2018-10-30 |
| 9097990 |
Lithographic apparatus and stage system |
Jan-Gerard Cornelis Van Der Toorn, Marcel Koenraad Marie Baggen, Stefan Geerte Kruijswijk, Jeroen Pieter Starreveld, Michael Johannes Vervoordeldonk |
2015-08-04 |
| 8279401 |
Position control system, a lithographic apparatus and a method for controlling a position of a movable object |
Michael Johannes Vervoordeldonk |
2012-10-02 |
| 8279407 |
Stage system and lithographic apparatus comprising such stage system |
Ramidin Izair Kamidi, Henrikus Herman Marie Cox, Emiel Jozef Melanie Eussen, Ronald Casper Kunst, Engelbertus Antonius Fransiscus Van Der Pasch +1 more |
2012-10-02 |
| 8014881 |
Lithographic apparatus and device manufacturing method |
Petrus Marinus Christianus Maria Van Den Biggelaar, Yin Tim Tso, Marcel François Heertjes, Ramidin Izair Kamidi, Dennis Andreas Petrus Hubertina Houben +2 more |
2011-09-06 |