| 12405539 |
Substrate support and substrate table |
Coen Hubertus Matheus Baltis, Nicolaas Ten Kate, Marcus Martinus Petrus Adrianus Vermeulen, Siegfried Alexander Tromp, Frank Pieter Albert Van Den Berkmortel +3 more |
2025-09-02 |
| 12386273 |
Substrate holder, lithographic apparatus and method |
Andre Schreuder, Ludolf POSTMA |
2025-08-12 |
| 12249535 |
Substrate holder for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Marcus Martinus Petrus Adrianus Vermeulen, Simon Karel RAVENSBERGEN, Mark Constant Johannes Baggen, Roger Anton Marie Timmermans +1 more |
2025-03-11 |
| 12197141 |
Suction clamp, object handler, stage apparatus and lithographic apparatus |
— |
2025-01-14 |
| 11749556 |
Substrate holder for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Marcus Martinus Petrus Adrianus Vermeulen, Simon Karel RAVENSBERGEN, Mark Constant Johannes Baggen, Roger Anton Marie Timmermans +1 more |
2023-09-05 |
| 11726411 |
Substrate shape measuring device, substrate handling device, substrate shape measuring unit and method to handle substrates |
Ringo Petrus Cornelis VAN DORST |
2023-08-15 |
| 11556064 |
Stage apparatus and method for calibrating an object loading process |
Theodorus Marcus Nagtegaal, Andre Schreuder, Anna Catharina Verkaik |
2023-01-17 |
| 11385547 |
Extraction body for lithographic apparatus |
Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver, Marcus Martinus Petrus Adrianus Vermeulen +6 more |
2022-07-12 |
| 11243476 |
Stage apparatus, lithographic apparatus, control unit and method |
Ringo Petrus Cornelis VAN DORST, Benjamin Cunnegonda Henricus Smeets, Mark Johannes Hermanus Frencken |
2022-02-08 |
| 11139196 |
Substrate holder for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Marcus Martinus Petrus Adrianus Vermeulen, Simon Karel RAVENSBERGEN, Mark Constant Johannes Baggen, Roger Anton Marie Timmermans +1 more |
2021-10-05 |
| 10705426 |
Extraction body for lithographic apparatus |
Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver, Marcus Martinus Petrus Adrianus Vermeulen +6 more |
2020-07-07 |
| 10578959 |
Support apparatus, lithographic apparatus and device manufacturing method |
Simon Karel RAVENSBERGEN, Niek Jacobus Johannes Roset, Pieter Renaat Maria Hennus |
2020-03-03 |
| 9377697 |
Lithographic apparatus and table for use in such an apparatus |
Mark Johannes Hermanus Frencken, Andre Bernardus Jeunink, Frederikus Johannes Maria De Vreede |
2016-06-28 |
| 8262166 |
Arm support, and sitting support with such arm support |
Henricus Johannes Adrianus Stuijt, Gerardus Richardus Bernardus Engelina Römer |
2012-09-11 |
| 8113590 |
Arm support, and sitting support with such arm support |
Henricus Johannes Adrianus Stuijt, Gerardus Richardus Bernardus Engelina Römer |
2012-02-14 |