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Object positioner, method for correcting the shape of an object, lithographic apparatus, object inspection apparatus, device manufacturing method |
Theodorus Marcus Nagtegaal, Oleg Viacheslavovich Voznyi |
2024-01-02 |
| 11860546 |
Fluid handling structure for lithographic apparatus |
Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more |
2024-01-02 |
| 11579533 |
Substrate holder, a lithographic apparatus and method of manufacturing devices |
Günes NAKIBOGLU, Coen Hubertus Matheus Baltis, Siegfried Alexander Tromp, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN +1 more |
2023-02-14 |
| 11454892 |
Fluid handling structure for lithographic apparatus |
Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more |
2022-09-27 |
| 11243476 |
Stage apparatus, lithographic apparatus, control unit and method |
Ringo Petrus Cornelis VAN DORST, Gijs Kramer, Benjamin Cunnegonda Henricus Smeets |
2022-02-08 |
| 11029607 |
Fluid handling structure for lithographic apparatus |
Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more |
2021-06-08 |
| 10895808 |
Substrate holder, a lithographic apparatus and method of manufacturing devices |
Günes NAKIBOGLU, Coen Hubertus Matheus Baltis, Siegfried Alexander Tromp, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN +1 more |
2021-01-19 |
| 9377697 |
Lithographic apparatus and table for use in such an apparatus |
Andre Bernardus Jeunink, Frederikus Johannes Maria De Vreede, Gijs Kramer |
2016-06-28 |
| 7859644 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method |
Jan-Gerard Cornelis Van Der Toorn, Hans Butler, Henrikus Herman Marie Cox, Evert Hendrik Jan Draaijer, Nicolaas Ten Kate +4 more |
2010-12-28 |
| 7330238 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method |
Jan-Gerard Cornelis Van Der Toorn, Hans Butler, Henrikus Herman Marie Cox, Evert Hendrik Jan Draaijer, Nicolaas Ten Kate +4 more |
2008-02-12 |