Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11914307 | Inspection apparatus lithographic apparatus measurement method | Bas Johannes Petrus ROSET, Johannes Hendrik Everhardus Aldegonda Muijderman | 2024-02-27 |
| 11243476 | Stage apparatus, lithographic apparatus, control unit and method | Ringo Petrus Cornelis VAN DORST, Gijs Kramer, Mark Johannes Hermanus Frencken | 2022-02-08 |
| 10551746 | Lithographic apparatus and method | Mark Constant Johannes Baggen | 2020-02-04 |
| 8570490 | Lithographic apparatus and control method | — | 2013-10-29 |
| 7716822 | Method of moving at least two elements of a placement machine | Josephus M. M. Van Gastel | 2010-05-18 |