Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11914307 | Inspection apparatus lithographic apparatus measurement method | Bas Johannes Petrus ROSET, Benjamin Cunnegonda Henricus Smeets | 2024-02-27 |
| 7145634 | Lithographic apparatus and device manufacturing method | Johannes Adrianus Antonius Theodorus Dams | 2006-12-05 |
| 7030958 | Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method | Cornelis Petrus Luijkx, Vadim Yevgenyevich Banine, Hako Botma, Martinus Van Duijnhoven, Markus Franciscus Antonius Eurlings +3 more | 2006-04-18 |