Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11914307 | Inspection apparatus lithographic apparatus measurement method | Johannes Hendrik Everhardus Aldegonda Muijderman, Benjamin Cunnegonda Henricus Smeets | 2024-02-27 |
| 10599049 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Siegfried Alexander Tromp | 2020-03-24 |
| 10192772 | Substrate table and lithographic apparatus | Satish Achanta, Tiannan GUAN, Raymond Wilhelmus Louis Lafarre, Ilya MALAKHOVSKY, Siegfried Alexander Tromp +1 more | 2019-01-29 |