| 12405539 |
Substrate support and substrate table |
Coen Hubertus Matheus Baltis, Nicolaas Ten Kate, Marcus Martinus Petrus Adrianus Vermeulen, Frank Pieter Albert Van Den Berkmortel, Niek Jacobus Johannes Roset +3 more |
2025-09-02 |
| 12315756 |
Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of use |
Michael Marinus Anna STEUR, Nicolaas Ten Kate, Koen Gerhardus Winkels, Antonius Franciscus Johannes De Groot |
2025-05-27 |
| 12287586 |
Stage system, lithographic apparatus, method for positioning and device manufacturing method |
Stef Marten Johan Janssens, Bert Dirk SCHOLTEN, Sjoerd Nicolaas Lambertus Donders, Teunis Van Dam, Peter Mark Overschie +1 more |
2025-04-29 |
| 11898601 |
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method |
Antonie Hendrik Verweij, Abraham Alexander Soethoudt, Jan Pieter Van De Poel, Mark Constant Johannes Baggen |
2024-02-13 |
| 11860552 |
Stage system, lithographic apparatus, method for positioning and device manufacturing method |
Stef Marten Johan Janssens, Bert Dirk SCHOLTEN, Sjoerd Nicolaas Lambertus Donders, Teunis Van Dam, Peter Mark Overschie +1 more |
2024-01-02 |
| 11664264 |
Lithographic apparatus, method for unloading a substrate and method for loading a substrate |
Andre Bernardus Jeunink, Robby Franciscus Josephus MARTENS, Youssef Karel Maria De Vos, Ringo Petrus Cornelis VAN DORST, Gerhard Albert TEN BRINKE +11 more |
2023-05-30 |
| 11579533 |
Substrate holder, a lithographic apparatus and method of manufacturing devices |
Günes NAKIBOGLU, Coen Hubertus Matheus Baltis, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN, Daan Daniel Johannes Antonius Van Sommeren +1 more |
2023-02-14 |
| 11385547 |
Extraction body for lithographic apparatus |
Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver +6 more |
2022-07-12 |
| 11098759 |
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method |
Antonie Hendrik Verweij, Abraham Alexander Soethoudt, Jan Pieter Van De Poel, Mark Constant Johannes Baggen |
2021-08-24 |
| 10895808 |
Substrate holder, a lithographic apparatus and method of manufacturing devices |
Günes NAKIBOGLU, Coen Hubertus Matheus Baltis, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN, Daan Daniel Johannes Antonius Van Sommeren +1 more |
2021-01-19 |
| 10705426 |
Extraction body for lithographic apparatus |
Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver +6 more |
2020-07-07 |
| 10599049 |
Substrate holder, a lithographic apparatus and method of manufacturing devices |
Bas Johannes Petrus ROSET |
2020-03-24 |
| 10527092 |
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method |
Antonie Hendrik Verweij, Abraham Alexander Soethoudt, Jan Pieter Van De Poel, Mark Constant Johannes Baggen |
2020-01-07 |
| 10481502 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2019-11-19 |
| 10192772 |
Substrate table and lithographic apparatus |
Satish Achanta, Tiannan GUAN, Raymond Wilhelmus Louis Lafarre, Ilya MALAKHOVSKY, Bas Johannes Petrus ROSET +1 more |
2019-01-29 |
| 10018924 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Jacobus Josephus Leijssen +3 more |
2018-07-10 |
| 10018926 |
Lithographic apparatus and method of manufacturing a lithographic apparatus |
Rogier Hendrikus Magdalena Cortie, Christianus Wilhelmus Johannes Berendsen, Andre Bernardus Jeunink, Adrianus Hendrik Koevoets, Jim Vincent Overkamp +2 more |
2018-07-10 |
| 9983489 |
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation |
Christianus Wilhelmus Johannes Berendsen, Marcel Beckers, Henricus Jozef Castelijns, Hubertus Antonius Geraets, Adrianus Hendrik Koevoets +3 more |
2018-05-29 |
| 9915877 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2018-03-13 |
| 9785055 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2017-10-10 |
| 9298104 |
Substrate holder, lithographic apparatus, and device manufacturing method |
Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre |
2016-03-29 |
| 9256139 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Jacobus Josephus Leijssen +3 more |
2016-02-09 |
| 8908143 |
Substrate holder, lithographic apparatus, and device manufacturing method involving a heater and/or temperature sensor |
Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre |
2014-12-09 |