Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287586 | Stage system, lithographic apparatus, method for positioning and device manufacturing method | Stef Marten Johan Janssens, Bert Dirk SCHOLTEN, Sjoerd Nicolaas Lambertus Donders, Teunis Van Dam, Theresa Mary Spaan-Burke +1 more | 2025-04-29 |
| 11860552 | Stage system, lithographic apparatus, method for positioning and device manufacturing method | Stef Marten Johan Janssens, Bert Dirk SCHOLTEN, Sjoerd Nicolaas Lambertus Donders, Teunis Van Dam, Theresa Mary Spaan-Burke +1 more | 2024-01-02 |