| 12405539 |
Substrate support and substrate table |
Coen Hubertus Matheus Baltis, Nicolaas Ten Kate, Siegfried Alexander Tromp, Frank Pieter Albert Van Den Berkmortel, Niek Jacobus Johannes Roset +3 more |
2025-09-02 |
| 12249535 |
Substrate holder for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Simon Karel RAVENSBERGEN, Mark Constant Johannes Baggen, Gijs Kramer, Roger Anton Marie Timmermans +1 more |
2025-03-11 |
| 11749556 |
Substrate holder for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Simon Karel RAVENSBERGEN, Mark Constant Johannes Baggen, Gijs Kramer, Roger Anton Marie Timmermans +1 more |
2023-09-05 |
| 11385547 |
Extraction body for lithographic apparatus |
Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver +6 more |
2022-07-12 |
| 11139196 |
Substrate holder for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Simon Karel RAVENSBERGEN, Mark Constant Johannes Baggen, Gijs Kramer, Roger Anton Marie Timmermans +1 more |
2021-10-05 |
| 10705426 |
Extraction body for lithographic apparatus |
Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver +6 more |
2020-07-07 |
| 10649349 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface |
Martinus Hendrikus Antonius Leenders, Sjoerd Nicolaas Lambertus Donders, Harry Sewell, Louis John Markoya, Diane Elaine Markoya |
2020-05-12 |
| 10185231 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface |
Martinus Hendrikus Antonius Leenders, Sjoerd Nicolaas Lambertus Donders, Harry Sewell, Louis John Markoya, Diane Elaine Markoya |
2019-01-22 |
| 9632425 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface |
Martinus Hendrikus Antonius Leenders, Sjoerd Nicolaas Lambertus Donders, Harry Sewell, Louis John Markoya, Diane McCafferty |
2017-04-25 |
| 9213246 |
Fluid extraction system, lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Robertus Nicodemus Jacobus Van Ballegoij, Michel Riepen, Martinus Wilhelmus Van Den Heuvel, Paul Petrus Joannes Berkvens +3 more |
2015-12-15 |
| 9052613 |
Displacement device, lithographic apparatus and positioning method |
Johannes Hubertus Antonius Van De Rijdt, Joost Jeroen Ottens, Erik Johannes Antonius Manders |
2015-06-09 |
| 9052612 |
Support structure, lithographic apparatus and method |
Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens |
2015-06-09 |
| 8781775 |
Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus |
Hans Butler, Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen, Engelbertus Antonius Fransiscus Van Der Pasch, Harmen Klaas Van Der Schoot +2 more |
2014-07-15 |
| 8654309 |
Fluid extraction system, lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Robertus Nicodemus Jacobus Van Ballegoij, Michel Riepen, Martinus Wilhelmus Van Den Heuvel, Paul Petrus Joannes Berkvens +3 more |
2014-02-18 |
| 8274641 |
Substrate table, lithographic apparatus and device manufacturing method |
Eva Mondt, Noud Jan Gilissen, Hernes Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra +1 more |
2012-09-25 |
| 8269949 |
Lithographic apparatus and device manufacturing method |
Andre Bernardus Jeunink, Erik Roelof Loopstra, Joost Jeroen Ottens, Rene Theodorus Petrus Compen, Peter Smits +4 more |
2012-09-18 |
| 8125616 |
Lithographic apparatus with pre-formed flexible transportation line |
Henrikus Herman Marie Cox, Godfried Katharina Hubertus Franciscus Geelen, Jérôme François Sylvain Virgile Van Loo |
2012-02-28 |
| 7656502 |
Lithographic apparatus and device manufacturing method |
Harmen Klaus Van Der Schoot, Noud Jan Gilissen, Peter Paul Steijaert, Erik Roelof Loopstra, Nicolaas Rudolf Kemper +8 more |
2010-02-02 |
| 7365473 |
Method for displacing a movable element by means of a least two actuators facing each other and positioned on a stator, as well as a wave motor, displacing device and assembly |
Felix Godfried Peter Peeters |
2008-04-29 |
