| 12405539 |
Substrate support and substrate table |
Coen Hubertus Matheus Baltis, Nicolaas Ten Kate, Marcus Martinus Petrus Adrianus Vermeulen, Siegfried Alexander Tromp, Frank Pieter Albert Van Den Berkmortel +3 more |
2025-09-02 |
| 12249535 |
Substrate holder for use in a lithographic apparatus |
Marcus Martinus Petrus Adrianus Vermeulen, Simon Karel RAVENSBERGEN, Mark Constant Johannes Baggen, Gijs Kramer, Roger Anton Marie Timmermans +1 more |
2025-03-11 |
| 11846879 |
Method of unloading an object from a support table |
Giovanna De Simone, Marco Adrianus Peter Van Den Heuvel, Thibault Simon Mathieu Laurent, Ruud Hendrikus Martinus Johannes Bloks, Justin Johannes Hermanus Gerritzen |
2023-12-19 |
| 11749556 |
Substrate holder for use in a lithographic apparatus |
Marcus Martinus Petrus Adrianus Vermeulen, Simon Karel RAVENSBERGEN, Mark Constant Johannes Baggen, Gijs Kramer, Roger Anton Marie Timmermans +1 more |
2023-09-05 |
| 11500296 |
Method of unloading an object from a support table |
Giovanna De Simone, Marco Adrianus Peter Van Den Heuvel, Thibault Simon Mathieu Laurent, Ruud Hendrikus Martinus Johannes Bloks, Justin Johannes Hermanus Gerritzen |
2022-11-15 |
| 11385547 |
Extraction body for lithographic apparatus |
Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver +6 more |
2022-07-12 |
| 11175594 |
Method of unloading an object from a support table |
Giovanna De Simone, Marco Adrianus Peter Van Den Heuvel, Thibault Simon Mathieu Laurent, Ruud Hendrikus Martinus Johannes Bloks, Justin Johannes Hermanus Gerritzen |
2021-11-16 |
| 11139196 |
Substrate holder for use in a lithographic apparatus |
Marcus Martinus Petrus Adrianus Vermeulen, Simon Karel RAVENSBERGEN, Mark Constant Johannes Baggen, Gijs Kramer, Roger Anton Marie Timmermans +1 more |
2021-10-05 |
| RE48676 |
Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate, Sergei Shulepov, Raymond Wilhelmus Louis Lafarre |
2021-08-10 |
| 10871714 |
Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus |
Nicolaas Ten Kate, Sergei Shulepov, Raymond Wilhelmus Louis Lafarre |
2020-12-22 |
| 10705426 |
Extraction body for lithographic apparatus |
Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver +6 more |
2020-07-07 |
| 10578959 |
Support apparatus, lithographic apparatus and device manufacturing method |
Gijs Kramer, Simon Karel RAVENSBERGEN, Pieter Renaat Maria Hennus |
2020-03-03 |
| RE47237 |
Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate, Sergei Shulepov, Raymond Wilhelmus Louis Lafarre |
2019-02-12 |
| 9971255 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more |
2018-05-15 |
| 9927715 |
Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus |
Nicolaas Ten Kate, Sergei Shulepov, Raymond Wilhelmus Louis Lafarre |
2018-03-27 |
| 9588437 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more |
2017-03-07 |
| 9235138 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more |
2016-01-12 |
| 8941815 |
Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Jozef Petrus Henricus Benschop, Nicolaas Ten Kate, Gerardus Adrianus Antonius Maria Kusters, Alexander Nikolov Zdravkov +2 more |
2015-01-27 |
| 8767169 |
Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate, Sergei Shulepov, Raymond Wilhelmus Louis Lafarre |
2014-07-01 |
| 8659742 |
Lithographic apparatus and a device manufacturing method |
Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre, Alexander Nikolov Zdravkov |
2014-02-25 |
| 8441610 |
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods |
Ronald Van Der Ham, Tjarko Adriaan Rudolf Van Empel, Herman Vogel |
2013-05-14 |
| 7924399 |
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods |
Ronald Van Der Ham, Tjarko Adriaan Rudolf Van Empel, Herman Vogel |
2011-04-12 |
| 7728951 |
Lithographic apparatus and method for conditioning an interior space of a device manufacturing apparatus |
Tjarko Adriaan Rudolf Van Empel, Ronald Van Der Ham |
2010-06-01 |
| 7432513 |
Gas shower, lithographic apparatus and use of a gas shower |
Tjarko Adriaan Rudolf Van Empel, Ronald Van Der Ham |
2008-10-07 |
| 7253875 |
Lithographic apparatus and device manufacturing method |
Bernardus Antonius Johannes Luttikhuis, Engelbertus Antonius Fransiscus Van Der Pasch, Ronald Van Der Ham |
2007-08-07 |