Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10394141 | Radiation source and lithographic apparatus | Michel Riepen, Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp +12 more | 2019-08-27 |
| 9983489 | Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation | Christianus Wilhelmus Johannes Berendsen, Marcel Beckers, Hubertus Antonius Geraets, Adrianus Hendrik Koevoets, Leon Martin Levasier +3 more | 2018-05-29 |
| 9971255 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Cornelius Maria Rops +1 more | 2018-05-15 |
| 9753383 | Radiation source and lithographic apparatus | Michel Riepen, Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp +12 more | 2017-09-05 |
| 9588437 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Cornelius Maria Rops +1 more | 2017-03-07 |
| 9235138 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Cornelius Maria Rops +1 more | 2016-01-12 |
| 8891053 | Lithographic apparatus, method of manufacturing an article for a lithographic apparatus and device manufacturing method | Nina Vladimirovna Dziomkina, Nicolaas Ten Kate, Sandra Van Der Graaf | 2014-11-18 |
| 8755026 | Lithographic apparatus and a device manufacturing method | Jeroen Gerard Gosen, Albert Johannes Maria Jansen, Nicolaas Ten Kate, Marco Koert Stavenga, Koen Steffens +2 more | 2014-06-17 |
| 8553206 | Lithographic apparatus, coverplate and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Laurentius Johannes Adrianus Van Bokhoven | 2013-10-08 |
| 8405819 | Immersion lithographic apparatus and device manufacturing method | Laurentius Johannes Adrianus Van Bokhoven, Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre, Petrus Martinus Gerardus Johannes Arts | 2013-03-26 |