Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774865 | Method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatus | Thijs Adriaan Cornelis Van Keulen, Hendrikus Herman Marie Cox, Ramidin Izair Kamidi | 2023-10-03 |
| 9651877 | Position measurement system, grating for a position measurement system and method | — | 2017-05-16 |
| 9575416 | Lithographic apparatus, device manufacturing method and displacement measurement system | Engelbertus Antonius Fransiscus Van Der Pasch, Ruud Antonius Catharina Maria Beerens, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Fransiscus Mathijs Jacobs +1 more | 2017-02-21 |
| 9470988 | Substrate positioning system, lithographic apparatus and device manufacturing method | Engelbertus Antonius Fransiscus Van Der Pasch, Albert Johannes Maria Jansen, Andre Bernardus Jeunink, Johannes Mathias Theodorus Antonius Adriaens, Frank Auer +4 more | 2016-10-18 |
| 8922756 | Position measurement system, lithographic apparatus and device manufacturing method | Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Robbert Edgar Van Leeuwen, Adrianus Hendrik Koevoets | 2014-12-30 |
| 8781775 | Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus | Hans Butler, Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Harmen Klaas Van Der Schoot, Marc Wilhelmus Maria Van Der Wijst +2 more | 2014-07-15 |
| 8681316 | Measurement system, method and lithographic apparatus | Henrikus Herman Marie Cox, Thomas Augustus Mattaar, Martinus Theodorus Jacobus Pieterse, Rob Antonius Andries Verkooijen | 2014-03-25 |
| 8451454 | Stage system, lithographic apparatus including such stage system, and correction method | Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch | 2013-05-28 |
| 8174671 | Lithographic projection apparatus and method for controlling a support structure | Erik Roelof Loopstra, Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst | 2012-05-08 |
| 7889314 | Calibration methods, lithographic apparatus and patterning device for such lithographic apparatus | — | 2011-02-15 |
| 7756597 | Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program | Norbertus Josephus Martinus Van Den Nieuwelaar, Johannes Onvlee, Henricus Petrus Van Lierop, Robert Dumont, Jacobus Rooda +1 more | 2010-07-13 |
| 7557903 | Lithographic apparatus and device manufacturing method | Carolus Johannes Catharina Schoormans, Emiel Jozef Melanie Eussen, Nicolas Lallemant, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Mathias Theodorus Antonius Adriaens | 2009-07-07 |
| 7333174 | Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness | Arthur Winfried Eduardus Minnaert, Luberthus Ouwehand, Johannes Mathias Theodorus Antonius Adriens, Wouter Onno Pril | 2008-02-19 |
| 7012672 | Lithographic apparatus, system, method, computer program, and apparatus for height map analysis | Tasja Van Rhee, Thomas Josephus Maria Castenmiller, Alex Van Zon, Michael Broers | 2006-03-14 |