Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7333174 | Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness | Willem Herman Gertruda Anna Koenen, Arthur Winfried Eduardus Minnaert, Luberthus Ouwehand, Wouter Onno Pril | 2008-02-19 |