Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174552 | Lithographic apparatus and electrostatic clamp designs | Victor Antonio PEREZ-FALCON, Marcus Adrianus Van De Kerkhof, Daniel Leslie Hall, Christopher Mason, Johannes Hubertus Josephina Moors +1 more | 2024-12-24 |
| 9606445 | Lithographic apparatus and method of manufacturing a device | Vadim Yevgenyevich Banine, Marcel Johannus Elisabeth Hubertus Muitjens, Andrei Mikhailovich Yakunin, Luigi Scaccabarozzi, Hans Joerg Mallmann +8 more | 2017-03-28 |
| 7889357 | Method for positioning a target portion of a substrate with respect to a focal plane of a projection system | Cornelis Henricus Van De Vin, Ralph Brinkhof, Alex Van Zon | 2011-02-15 |
| 7746484 | Method for positioning a target portion of a substrate with respect to a focal plane of a projection system | Cornelis Henricus Van De Vin, Ralph Brinkhof, Alex Van Zon | 2010-06-29 |
| 7359030 | Lithographic apparatus and device manufacturing method | Klaus Simon, Joeri Lof, Erik Marie Jose Smeets | 2008-04-15 |
| 7333174 | Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness | Willem Herman Gertruda Anna Koenen, Luberthus Ouwehand, Johannes Mathias Theodorus Antonius Adriens, Wouter Onno Pril | 2008-02-19 |
| 6822730 | Substrate holder and device manufacturing method | Johannes Wilhelmus Maria Krikhaar, Hubertus Jacobus Maria Van Beijsterveldt, Maurice Anton Jaques Teuwen, Joeri Lof | 2004-11-23 |
| 6618118 | Optical exposure method, device manufacturing method and lithographic projection apparatus | Henricus Wilhelmus Maria Van Buel | 2003-09-09 |