Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9645512 | Substrate distortion measurement | — | 2017-05-09 |
| 8194242 | Substrate distortion measurement | Antonius Theodorus Anna Maria Derksen, Pieter Willem Herman De Jager | 2012-06-05 |
| 8139218 | Substrate distortion measurement | — | 2012-03-20 |
| 7936447 | Lithographic apparatus and device manufacturing method | Antonius Theodorus Anna Maria Derksen, David Christopher Ockwell, Henricus Jozef Peter Lenders | 2011-05-03 |
| 7808612 | Lithographic apparatus and method for masking a substrate | Remko Wakker | 2010-10-05 |
| 7777863 | Lithographic apparatus with mask to prevent exposure of peripheral exposure region of substrate | Remko Wakker | 2010-08-17 |
| 7398177 | Measurement substrate, substrate table, lithographic apparatus, method of calculating an angle of an alignment beam of an alignment system, and alignment verification method | Fransiscus Godefridus Casper Bijnen, Geoffrey Norman Phillipps | 2008-07-08 |
| 7359030 | Lithographic apparatus and device manufacturing method | Klaus Simon, Joeri Lof, Arthur Winfried Eduardus Minnaert | 2008-04-15 |