Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7751047 | Alignment and alignment marks | Henricus Wilhelmus Maria Van Buel | 2010-07-06 |
| 7477403 | Optical position assessment apparatus and method | Cheng-Qun Gui, Johan Christiaan Gerard Hoefnagels, Pieter Willem Herman De Jager, Joannes Theodoor De Smit | 2009-01-13 |
| 7459247 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit | 2008-12-02 |
| 7420676 | Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus | Joeri Lof, Henricus Wilhelmus Maria Van Buel, Gerardus Johannes Joseph Keijsers, Robertus Victorius Maria Scheepens | 2008-09-02 |
| 7398177 | Measurement substrate, substrate table, lithographic apparatus, method of calculating an angle of an alignment beam of an alignment system, and alignment verification method | Erik Marie Jose Smeets, Geoffrey Norman Phillipps | 2008-07-08 |
| 7193231 | Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby | Joeri Lof, Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui | 2007-03-20 |
| 6936385 | Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods | Joeri Lof, Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui | 2005-08-30 |