Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8610878 | Lithographic apparatus and method | Johannes Jacobus Matheus Baselmans, Francis Fahrni, Heine Melle Mulder, Willem Richard Pongers, Joost Cyrillus Lambert Hageman +5 more | 2013-12-17 |
| 7675606 | Lithographic apparatus and method | Enno Van Den Brink, Henricus Wilhelmus Maria Van Buel, Joseph Consolini, Klaus Simon, Johannes Theodoor De Smit +6 more | 2010-03-09 |
| 7570342 | Radiation exposure apparatus comprising a gas flushing system | Klaus Simon, Enno Van Den Brink, Adrianus Hubertus Henricus Van Dijk, Hubertus Antonius Marinus Baijens | 2009-08-04 |
| 7420676 | Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus | Joeri Lof, Fransiscus Godefridus Casper Bijnen, Henricus Wilhelmus Maria Van Buel, Robertus Victorius Maria Scheepens | 2008-09-02 |
| 7253077 | Substrate, method of preparing a substrate, method of measurement, lithographic apparatus, device manufacturing method and device manufactured thereby, and machine-readable storage medium | Peter Ten Berge | 2007-08-07 |
| 6583858 | Substrate holder for lithographic apparatus | Frank Van Schaik | 2003-06-24 |