Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7420676 | Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus | Joeri Lof, Fransiscus Godefridus Casper Bijnen, Henricus Wilhelmus Maria Van Buel, Gerardus Johannes Joseph Keijsers | 2008-09-02 |