Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7879514 | Lithographic method and patterning device | Cheng-Qun Gui, Rudy Jan Maria Pellens, Paulus Wilhelmus Leonardus Van Dijk | 2011-02-01 |
| 7562686 | Method and system for 3D alignment in wafer scale integration | Keith Frank Best, Franciscus Godefridus Casper Bijnen, Enno Van Den Brink, Henricus Wilhelmus Maria Van Buel, Joseph Consolini +1 more | 2009-07-21 |
| 7398177 | Measurement substrate, substrate table, lithographic apparatus, method of calculating an angle of an alignment beam of an alignment system, and alignment verification method | Erik Marie Jose Smeets, Fransiscus Godefridus Casper Bijnen | 2008-07-08 |