Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823576 | Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method | Dries Smeets, Arno Jan Bleeker, Christopher J. Lee, Pieter Willem Herman De Jager, Heine Melle Mulder | 2017-11-21 |
| 8780321 | Lithographic apparatus and device manufacturing method | Thijs Egidius Johannes Knaapen, Richard Joseph Bruls, Youri Johannes Laurentius Maria Van Dommelen, Johannes Henricus Wilhelmus Jacobs, Martijn Hendrik Kamphuis +10 more | 2014-07-15 |
| 8576374 | Lithographic apparatus and method | Keith Frank Best, Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui, Johannes Onvlee, Remi Daniel Marie Edart +2 more | 2013-11-05 |
| 7892903 | Device manufacturing method and substrate comprising multiple resist layers | — | 2011-02-22 |
| 7879514 | Lithographic method and patterning device | Geoffrey Norman Phillipps, Cheng-Qun Gui, Paulus Wilhelmus Leonardus Van Dijk | 2011-02-01 |
| 7626681 | Lithographic apparatus and method | Budiman Sutedja, Johannes Paulus Adrianus Maria Van Den Heuvel, Paulus Wilhelmus Leonardus Van Dijk | 2009-12-01 |
| 7494828 | Substrate holder and device manufacturing method | Keith Frank Best, Johannes Wilhelmus Maria Krikhaar | 2009-02-24 |
| 7413942 | T-gate formation | Frank Linskens | 2008-08-19 |