Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032301 | Substrate support, lithographic apparatus and loading method | Antonius Franciscus Johannes De Groot, Wim Symens, David Ferdinand Vles | 2024-07-09 |
| 11994848 | Systems and methods for adjusting prediction models between facility locations | Arnaud HUBAUX | 2024-05-28 |
| 11556063 | Substrate support, lithographic apparatus and loading method | Antonius Franciscus Johannes De Groot, Wim Symens, David Ferdinand Vles | 2023-01-17 |
| 10459354 | Lithographic apparatus and lithographic projection method | Kevin VAN DE RUIT, Bart Dinand Paarhuis, Jean-Philippe Xavier Van Damme, Cornelis Melchior BROUWER | 2019-10-29 |
| 10444647 | Methods and apparatus for determining the position of a target structure on a substrate, methods and apparatus for determining the position of a substrate | Franciscus Godefridus Casper Bijnen, Augustinus Hubert Maria Boshouwers | 2019-10-15 |
| 10423081 | Reticle cooling by non-uniform gas flow | Thomas Venturino, Geoffrey Alan Schultz, Daniel N. Galburt, Daniel Nathan Burbank, Santiago E. DELPUERTO +3 more | 2019-09-24 |
| 10031428 | Gas flow optimization in reticle stage environment | Koen Cuypers, Marcelo Henrique De Andrade Oliveira, Marinus Jan Remie, Chattarbir Singh, Laurentius Johannes Adrianus Van Bokhoven +9 more | 2018-07-24 |
| 9977351 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Earl William Ebert, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +5 more | 2018-05-22 |
| 9857694 | Estimating deformation of a patterning device and/or a change in its position | Bearrach Moest, Peter A. Delmastro, Adrianus Martinus Van Der Wielen, Christopher Charles Ward | 2018-01-02 |
| 9766557 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Earl William Ebert, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +5 more | 2017-09-19 |
| 9696633 | Substrate handling apparatus and lithographic apparatus | Robert-Han Munnig Schmidt | 2017-07-04 |
| 9645502 | Lithographic apparatus, programmable patterning device and lithographic method | Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Lucas Henricus Johannes Stevens, Sander Frederik Wuister, Nikolay Nikolaevich Iosad | 2017-05-09 |
| 9632433 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Earl William Ebert, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +5 more | 2017-04-25 |
| 9632434 | Reticle cooling system in a lithographic apparatus | Earl William Ebert, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +6 more | 2017-04-25 |
| 9372412 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Pieter Willem Herman De Jager, Erik Fritz | 2016-06-21 |
| 9335638 | Lithographic apparatus, programmable patterning device and lithographic method | Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Cheng-Qun Gui, Erwin John Van Zwet | 2016-05-10 |
| 9316926 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Pieter Willem Herman De Jager, Hendrik De Man | 2016-04-19 |
| 9235140 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Pieter Willem Herman De Jager, Erik Fritz | 2016-01-12 |
| 9134630 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Pieter Willem Herman De Jager, Erik Fritz | 2015-09-15 |
| 9041911 | Lithographic apparatus and device manufacturing method | Pieter Willem Herman De Jager, Erwin John Van Zwet | 2015-05-26 |
| 8947641 | Lithographic apparatus and method | Erik Roelof Loopstra | 2015-02-03 |
| 8636458 | Integrated post-exposure bake track | Suzan Leonie Auer-Jongepier, Petrus Rutgerus Bartray, Bernardus Antonius Johannes Luttikhuis, Reinder Teun Plug, Hubert Marie Segers | 2014-01-28 |
| 8576374 | Lithographic apparatus and method | Keith Frank Best, Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui, Rudy Jan Maria Pellens, Remi Daniel Marie Edart +2 more | 2013-11-05 |
| 8531648 | Lithographic apparatus, programmable patterning device and lithographic method | Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Cheng-Qun Gui, Erwin John Van Zwet | 2013-09-10 |
| 8345225 | Controllable radiation lithographic apparatus and method | Marcel Mathijs Theodore Marie Dierichs | 2013-01-01 |