Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531279 | System and method for optimizing a lithography exposure process | Elvino da Silveira, Wayne Fitzgerald, Jian Lu, Xin Song, J. Casey Donaher +1 more | 2022-12-20 |
| 11126096 | System and method for optimizing a lithography exposure process | Elvino da Silveira, Wayne Fitzgerald, Jian Lu, Xin Song, J. Casey Donaher +1 more | 2021-09-21 |
| 8576374 | Lithographic apparatus and method | Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui, Johannes Onvlee, Rudy Jan Maria Pellens, Remi Daniel Marie Edart +2 more | 2013-11-05 |
| 7567340 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Enno Van Den Brink, Budiman Sutedja, Peter Berge | 2009-07-28 |
| 7562686 | Method and system for 3D alignment in wafer scale integration | Geoffrey Norman Phillipps, Franciscus Godefridus Casper Bijnen, Enno Van Den Brink, Henricus Wilhelmus Maria Van Buel, Joseph Consolini +1 more | 2009-07-21 |
| 7531040 | Resist recovery method | Joseph Consolini, Cheng-Qun Gui, Alexander Friz | 2009-05-12 |
| 7501215 | Device manufacturing method and a calibration substrate | Joseph Consolini, Alexander Friz | 2009-03-10 |
| 7494828 | Substrate holder and device manufacturing method | Johannes Wilhelmus Maria Krikhaar, Rudy Jan Maria Pellens | 2009-02-24 |
| 7442476 | Method and system for 3D alignment in wafer scale integration | Joseph Consolini | 2008-10-28 |
| 7410880 | Method for measuring bonding quality of bonded substrates, metrology apparatus, and method of producing a device from a bonded substrate | Joseph Consolini, Alexander Friz | 2008-08-12 |
| 7320847 | Alternate side lithographic substrate imaging | Joseph Consolini, Alexander Friz | 2008-01-22 |
| 7256865 | Methods and apparatuses for applying wafer-alignment marks | Joseph Consolini, Cheng-Qun Gui, Alexander Friz | 2007-08-14 |
| 7133117 | Dual sided lithographic substrate imaging | Joseph Consolini, Shyam Shinde | 2006-11-07 |
| 7130049 | Method of measurement, method for providing alignment marks, and device manufacturing method | Joseph Consolini, Alexander Friz | 2006-10-31 |
| 7113258 | Lithographic apparatus | Henricus Wilhelmus Maria Van Buel, Joseph Consolini, Joeri Lof, Edwin Ross Shafer | 2006-09-26 |
| 7041996 | Method of aligning a substrate, a computer program, a device manufacturing method and a device manufactured thereby | Joseph Consolini, Alexander Friz, Henricus Wilhelmus Maria Van Buel | 2006-05-09 |
| 7019814 | Lithographic projection mask, device manufacturing method, and device manufactured thereby | Joseph Consolini, Alexander Friz | 2006-03-28 |
| 6914664 | Lithographic apparatus, alignment method and device manufacturing method | Alexander Friz, Joseph Consolini, Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui | 2005-07-05 |
| 6844244 | Dual sided lithographic substrate imaging | Joseph Consolini, Shyam Shinde | 2005-01-18 |