Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531279 | System and method for optimizing a lithography exposure process | Elvino da Silveira, Keith Frank Best, Wayne Fitzgerald, Jian Lu, Xin Song +1 more | 2022-12-20 |
| 11353800 | Conformal stage | Edward J. Ficarra, Christopher J. McLaughlin | 2022-06-07 |
| 11126096 | System and method for optimizing a lithography exposure process | Elvino da Silveira, Keith Frank Best, Wayne Fitzgerald, Jian Lu, Xin Song +1 more | 2021-09-21 |
| 9625832 | Planar motor system with increased efficiency | Craig R. Simpson, Peter John Gerard Dufault | 2017-04-18 |
| 8760624 | System and method for estimating field curvature | — | 2014-06-24 |
| 8395783 | System metrology core | Craig R. Simpson, Roger McCleary | 2013-03-12 |
| 5483345 | Alignment system for use in lithography utilizing a spherical reflector having a centered etched-on projection object | David S. Holbrook, Shepard D. Johnson, James Sozanski | 1996-01-09 |