Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8395783 | System metrology core | J. Casey Donaher, Craig R. Simpson | 2013-03-12 |
| 5166530 | Illuminator for microlithographic integrated circuit manufacture | — | 1992-11-24 |
| 5094641 | Apparatus and method for protecting, installing and removing mercury-vapor lamps | Robert S. Allegretto | 1992-03-10 |