Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531279 | System and method for optimizing a lithography exposure process | Keith Frank Best, Wayne Fitzgerald, Jian Lu, Xin Song, J. Casey Donaher +1 more | 2022-12-20 |
| 11126096 | System and method for optimizing a lithography exposure process | Keith Frank Best, Wayne Fitzgerald, Jian Lu, Xin Song, J. Casey Donaher +1 more | 2021-09-21 |
| 7385671 | High speed lithography machine and method | Steven David Gardner, Griffith L. Resor, III | 2008-06-10 |