Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11882770 | Area-selective deposition of metal nitride to fabricate devices | Rudy J. Wojtecki, Damon B. Farmer, Charles Thomas Rettner, Noel Arellano, Matthew W. Copel | 2024-01-23 |
| 10059820 | Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers | Markus Brink, Joy Cheng, Michael A. Guillorn, Chi-Chun Liu, Daniel P. Sanders +3 more | 2018-08-28 |
| 9738765 | Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers | Markus Brink, Joy Cheng, Gregory S. Doerk, Michael A. Guillorn, Chi-Chun Liu +4 more | 2017-08-22 |
| 8802347 | Silicon containing coating compositions and methods of use | Robert David Allen, Phillip Brock, Kuang-Jung Chen, Wu-Song Huang, Ratnam Sooriyakumaran +2 more | 2014-08-12 |
| 7531040 | Resist recovery method | Joseph Consolini, Keith Frank Best, Cheng-Qun Gui | 2009-05-12 |
| 7501215 | Device manufacturing method and a calibration substrate | Keith Frank Best, Joseph Consolini | 2009-03-10 |
| 7410880 | Method for measuring bonding quality of bonded substrates, metrology apparatus, and method of producing a device from a bonded substrate | Keith Frank Best, Joseph Consolini | 2008-08-12 |
| 7320847 | Alternate side lithographic substrate imaging | Keith Frank Best, Joseph Consolini | 2008-01-22 |
| 7256865 | Methods and apparatuses for applying wafer-alignment marks | Joseph Consolini, Keith Frank Best, Cheng-Qun Gui | 2007-08-14 |
| 7130049 | Method of measurement, method for providing alignment marks, and device manufacturing method | Joseph Consolini, Keith Frank Best | 2006-10-31 |
| 7041996 | Method of aligning a substrate, a computer program, a device manufacturing method and a device manufactured thereby | Keith Frank Best, Joseph Consolini, Henricus Wilhelmus Maria Van Buel | 2006-05-09 |
| 7019814 | Lithographic projection mask, device manufacturing method, and device manufactured thereby | Keith Frank Best, Joseph Consolini | 2006-03-28 |
| 6914664 | Lithographic apparatus, alignment method and device manufacturing method | Keith Frank Best, Joseph Consolini, Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui | 2005-07-05 |