Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7567340 | Lithographic apparatus and device manufacturing method | Cheng-Qun Gui, Keith Frank Best, Enno Van Den Brink, Budiman Sutedja | 2009-07-28 |
| 7562686 | Method and system for 3D alignment in wafer scale integration | Keith Frank Best, Geoffrey Norman Phillipps, Franciscus Godefridus Casper Bijnen, Enno Van Den Brink, Henricus Wilhelmus Maria Van Buel +1 more | 2009-07-21 |