Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899588 | Thermoelectric element | Gerhard Span, Arwed Siegloch, Juergen Haferkamp | 2018-02-20 |
| 9645502 | Lithographic apparatus, programmable patterning device and lithographic method | Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Johannes Onvlee, Lucas Henricus Johannes Stevens, Sander Frederik Wuister | 2017-05-09 |
| 9627601 | Thermoelectric element and method for the production thereof | — | 2017-04-18 |
| 9274418 | Imprint lithography apparatus and method | Pascale Anne Maury | 2016-03-01 |
| 9122178 | Object inspection systems and methods | Vitalii Ivanov, Vadim Yevgenyevich Banine, Arie Jeffrey Den Boef, Luigi Scaccabarozzi | 2015-09-01 |
| 8982318 | Lithographic apparatus and method | Cheng-Qun Gui | 2015-03-17 |
| 8383325 | Lithographic apparatus and method | Cheng-Qun Gui | 2013-02-26 |