Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11953835 | Methods and systems for maskless lithography | — | 2024-04-09 |
| 11343001 | Photon exchange based quantum network and method of operating such a network | Ronald Hanson, Peter Humphreys, Norbert Kalb | 2022-05-24 |
| 10928736 | Method and apparatus for direct write maskless lithography | Pieter Willem Herman De Jager, Coen Adrianus Verschuren, Erwin Paul SMAKMAN, Wouter Frans Willem Mulckhuyse, Pieter Verhoeff +1 more | 2021-02-23 |
| 10761315 | High power adaptive mirror | Teunis Cornelis van den Dool, Evert Nieuwkoop | 2020-09-01 |
| 10712674 | Method of determining an overlay error, manufacturing method and system for manufacturing of a multilayer semiconductor device, and semiconductor device manufactured thereby | Stefan Kuiper, Stefan Michael Bruno Bäumer, Hamed Sadeghian Marnani | 2020-07-14 |
| 10224685 | Multi-beam laser system | Federico Pettazzi, Frerik VAN BEIJNUM | 2019-03-05 |
| 10114289 | Exposure head, exposure apparatus and method of operating an exposure head | Jacobus Hubertus Theodoor Jamar, Herman Hendrikus Maalderink, Erwin Rinaldo Meinders, Peter Theodorus Maria Giesen, Henri Jacques Antoine Jean Starmans | 2018-10-30 |
| 10014165 | Radiation sensor device for high energy photons | Diederik Jan Maas, Evert Nieuwkoop, Michel van Putten, Norbertus Benedictus Koster | 2018-07-03 |
| 9715183 | Device, lithographic apparatus, method for guiding radiation and device manufacturing method | Wouter Dick KOEK, Arno Jan Bleeker, Erik Roelof Loopstra, Heine Melle Mulder, Dries Smeets +1 more | 2017-07-25 |
| 9482963 | Method of controlling a patterning device in a lithographic apparatus, device manufacturing method and lithographic apparatus | Wouter Frans Willem Mulckhuyse, Pieter Willem Herman De Jager | 2016-11-01 |
| 9416449 | Continuous patterned layer deposition | Ariël de Graaf, Paulus Willibrordus George Poodt, Adrianus Johannes Petrus Maria Vermeer | 2016-08-16 |
| 9372412 | Lithographic apparatus and device manufacturing method | Pieter Willem Herman De Jager, Johannes Onvlee, Erik Fritz | 2016-06-21 |
| 9335638 | Lithographic apparatus, programmable patterning device and lithographic method | Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Cheng-Qun Gui, Johannes Onvlee | 2016-05-10 |
| 9316926 | Lithographic apparatus and device manufacturing method | Pieter Willem Herman De Jager, Johannes Onvlee, Hendrik De Man | 2016-04-19 |
| 9235140 | Lithographic apparatus and device manufacturing method | Pieter Willem Herman De Jager, Johannes Onvlee, Erik Fritz | 2016-01-12 |
| 9134630 | Lithographic apparatus and device manufacturing method | Pieter Willem Herman De Jager, Johannes Onvlee, Erik Fritz | 2015-09-15 |
| 9041911 | Lithographic apparatus and device manufacturing method | Johannes Onvlee, Pieter Willem Herman De Jager | 2015-05-26 |
| 8925186 | System and method for picking and placement of chip dies | Léon Van Dooren, Adrianus Johannes Petrus Maria Vermeer, Kees Moddemeijer | 2015-01-06 |
| 8717535 | SLM calibration | Huibert Visser, Martinus Hendricus Hoeks, Borgert Kruizinga, Bob Streefkerk, Patricius Aloysius Jacobus Tinnemans +4 more | 2014-05-06 |
| 8531648 | Lithographic apparatus, programmable patterning device and lithographic method | Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Cheng-Qun Gui, Johannes Onvlee | 2013-09-10 |
| 7245357 | Lithographic apparatus and device manufacturing method | Jan Van Elp, Johannes Hubertus Josephina Moors, Hendrik Antony Johannes Neerhof, Joost Jeroen Ottens, Adrianus Mathijs Maria De Groof +3 more | 2007-07-17 |