Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10928736 | Method and apparatus for direct write maskless lithography | Pieter Willem Herman De Jager, Coen Adrianus Verschuren, Erwin Paul SMAKMAN, Erwin John Van Zwet, Pieter Verhoeff +1 more | 2021-02-23 |
| 9488921 | Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method of calculating setpoint data and a computer program | Patricius Aloysius Jacobus Tinnemans | 2016-11-08 |
| 9482963 | Method of controlling a patterning device in a lithographic apparatus, device manufacturing method and lithographic apparatus | Pieter Willem Herman De Jager, Erwin John Van Zwet | 2016-11-01 |
| 8049865 | Lithographic system, device manufacturing method, and mask optimization method | Patricius Aloysius Jacobus Tinnemans | 2011-11-01 |
| 7317510 | Lithographic apparatus and device manufacturing method | Marcel Bontekoe, Patricius Aloysius Jacobus Tinnemans, Lambertus Gerardus Maria Kessels, Marco Cornelis Jacobus Martinus Van Hassel | 2008-01-08 |
| 7209216 | Lithographic apparatus and device manufacturing method utilizing dynamic correction for magnification and position in maskless lithography | Pieter Willem Herman De Jager, Theodorus Leonardus Van Den Akker, Willem Jurrianus Venema, Lambertus Gerardus Maria Kessels | 2007-04-24 |